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In Situ Transport Measurements Reveal Source of Mobility Enhancement of MoS2 and MoTe2 during Dielectric Deposition
Shang, Ju Ying;
Moody, Michael J.;
Chen, Jiazhen;
Krylyuk, Sergiy;
Davydov, Albert V.;
Marks, Tobin J.;
Lauhon, Lincoln J.
Dataset for Atomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2
Moody, Michael J.;
Henning, Alex;
Jurca, Titel;
Shang, Ju Ying;
Bergeron, Hadallia;
Balla, Itamar;
Olding, Jack N.;
Weiss, Emily A.;
Hersam, Mark C.;
Lohr, Tracy L.;
Marks, Tobin J.;
Lauhon, Lincoln J.