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Sputter deposited Mo thin films: multimodal characterization of residual stress, resistivity, crystallinity, and surface morphology.
Adams, David P.;
Addamane, Sadhvikas J.;
Custer, Joyce O.;
Delrio, Frank W.;
Jauregui, Luis J.;
Kalaswad, Matias S.;
Khan, Ryan M.;
Henriksen, Amelia A.