Dataset for Thermogravimetric analysis of commercial tungsten molecular precursors for vapor phase materials growth processes

Currie, Taylor M.; McNealy-James, Terrick; Berriel, S. Novia; Preradovic, Konstantin; Sattelberger, Alfred P.; Banerjee, Parag; Jurca, Titel

thermogravimetric analysis precursor chemistry atomic layer deposition chemical vapor deposition

Year

2024

Source Name

3034ae5d-f0a8-439d-908b-e1d41d275279

License

Creative Commons Attribution 4.0

Contacts

Titel Jurca (titel.jurca@ucf.edu)

DOI

10.18126/ga5y-dh42 View on Datacite

Get the Data

This dataset is associated with the following publication: T. M. Currie, T. McNealy-James, S. N. Berriel, K. Preradovic, A. P. Sattelberger, P. Banerjee, and T. Jurca, RSC Advances, 2024. This dataset includes relevant TGA data, Temperature (°C) vs. Mass (%), for all eight precursors discussed in our publication. Please see our publication and associated supplementary information for more details. If using this dataset, please cite both this page and our publication.