Detail

Autonomous TSAXS mapping of sDSA sample

Gregory S. Doerk Marcus M. Noack, Masafumi Fukuto, Kevin G. Yager, Aaron Stein

Organizations

MDF Open

Year

2022

Source Name

sdsa_tsaxs_map

Contacts

Kevin G. Yager

DOI

10.18126/qboh-6fav View on Datacite
Autonomous SAXS mapping of sDSA sample. Experimental transmission small-angle x-ray scattering (TSAXS) data collected as a function of position for a selective directed self-assembly (sDSA) combinatorial sample. Sample was a grid of lithographically-defined chemical patterns (varying pitch and dose) with a blend of block copolymer materials cast on top. Measurement positions were selected machine-learning algorithm implementing a Gaussian Process (GP) method. Dataset contains raw SAXS detector images, as well as analysis results converting the image into linecuts in various azimuthal directions, and fitting those linecuts to extract peak position, width, and intensity.